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Passivation of GaAs field-effect transistors in diluted S2Cl2 solution

Wu, Y. / Liu, Y. / Ding, X. M. / Obbard, E. G. / Wang, X. Z. / Ding, H. J. / Hou, X. Y. / Li, X. B.

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Passivation of GaAs field-effect transistors in diluted S2Cl2 solution

Wu, Y. / Liu, Y. / Ding, X. M. / Obbard, E. G. / Wang, X. Z. / Ding, H. J. / Hou, X. Y. / Li, X. B.

Passivation of GaAs field-effect transistors in diluted S2Cl2 solution

Wu, Y. / Liu, Y. / Ding, X. M. / Obbard, E. G. / Wang, X. Z. / Ding, H. J. / Hou, X. Y. / Li, X. B.

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Title:

Passivation of GaAs field-effect transistors in diluted S2Cl2 solution

Contributors:

Wu, Y. (author) / Liu, Y. (author) / Ding, X. M. (author) / Obbard, E. G. (author) / Wang, X. Z. (author) / Ding, H. J. (author) / Hou, X. Y. (author) / Li, X. B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 228 ; 5-9

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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