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Raman microprobe mapping of residual microstresses in 3C-SiC film epitaxial lateral grown on patterned Si(1 1 1)
Raman microprobe mapping of residual microstresses in 3C-SiC film epitaxial lateral grown on patterned Si(1 1 1)
Raman microprobe mapping of residual microstresses in 3C-SiC film epitaxial lateral grown on patterned Si(1 1 1)
Lee, C. J. (author) / Pezzotti, G. (author) / Okui, Y. (author) / Nishino, S. (author)
APPLIED SURFACE SCIENCE ; 228 ; 10-16
2004-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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