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Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Kim, H. W. / Kim, N. H.

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Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Kim, H. W. / Kim, N. H.

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Kim, H. W. / Kim, N. H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Contributors:

Kim, H. W. (author) / Kim, N. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 110 ; 34-37

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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