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Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

Kwak, J. C. / Lee, Y. H. / Choi, B. H.

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Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

Kwak, J. C. / Lee, Y. H. / Choi, B. H.

Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

Kwak, J. C. / Lee, Y. H. / Choi, B. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

Contributors:

Kwak, J. C. (author) / Lee, Y. H. (author) / Choi, B. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 230 ; 249-253

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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