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Surface Damage of Crystalline Silicon by Low Fluence Femtosecond Laser Pulses

Lam, Y. C. / Tran, D. V. / Zheng, H. Y. / Murukeshan, V. M. / Chai, J. C. / Hardt, D. E.

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Surface Damage of Crystalline Silicon by Low Fluence Femtosecond Laser Pulses

Lam, Y. C. / Tran, D. V. / Zheng, H. Y. / Murukeshan, V. M. / Chai, J. C. / Hardt, D. E.

Surface Damage of Crystalline Silicon by Low Fluence Femtosecond Laser Pulses

Lam, Y. C. / Tran, D. V. / Zheng, H. Y. / Murukeshan, V. M. / Chai, J. C. / Hardt, D. E.

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Document information

Title:

Surface Damage of Crystalline Silicon by Low Fluence Femtosecond Laser Pulses

Contributors:

Lam, Y. C. (author) / Tran, D. V. (author) / Zheng, H. Y. (author) / Murukeshan, V. M. (author) / Chai, J. C. (author) / Hardt, D. E. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 11 ; 217-222

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

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