Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment: Fid-Bau Portal

Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

Halidou, I. / Benzarti, Z. / Boufaden, T. / El Jani, B. / Juillaguet, S. / Ramonda, M.

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Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

Halidou, I. / Benzarti, Z. / Boufaden, T. / El Jani, B. / Juillaguet, S. / Ramonda, M.

Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

Halidou, I. / Benzarti, Z. / Boufaden, T. / El Jani, B. / Juillaguet, S. / Ramonda, M.

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Check availability in my library

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Document information

Title:

Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

Contributors:

Halidou, I. (author) / Benzarti, Z. (author) / Boufaden, T. (author) / El Jani, B. (author) / Juillaguet, S. (author) / Ramonda, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 110 ; 251-255

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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