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Mechanisms in Electrochemical Etching of alpha-SiC Substrates

Mikami, H. / Hatayama, T. / Yano, H. / Uraoka, Y. / Fuyuki, T.

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Mechanisms in Electrochemical Etching of alpha-SiC Substrates

Mikami, H. / Hatayama, T. / Yano, H. / Uraoka, Y. / Fuyuki, T.

Mechanisms in Electrochemical Etching of alpha-SiC Substrates

Mikami, H. / Hatayama, T. / Yano, H. / Uraoka, Y. / Fuyuki, T.

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Document information

Title:

Mechanisms in Electrochemical Etching of alpha-SiC Substrates

Contributors:

Mikami, H. (author) / Hatayama, T. (author) / Yano, H. (author) / Uraoka, Y. (author) / Fuyuki, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 813-816

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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