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Electrochemical pore etching in Ge

Cheng, F. / Carstensen, J. / Foll, H.

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Electrochemical pore etching in Ge

Cheng, F. / Carstensen, J. / Foll, H.

Electrochemical pore etching in Ge

Cheng, F. / Carstensen, J. / Foll, H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electrochemical pore etching in Ge

Contributors:

Cheng, F. (author) / Carstensen, J. (author) / Foll, H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 694-700

Publication date:

2006-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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