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    Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (1120) Face

    New search for: Negoro, Y.
    New search for: Katsumoto, K.
    New search for: Kimoto, T.
    New search for: Matsunami, H.
    New search for: Schmid, F.
    New search for: Pensl, G.

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    Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (1120) Face

    New search for: Negoro, Y.
    New search for: Katsumoto, K.
    New search for: Kimoto, T.
    New search for: Matsunami, H.
    New search for: Schmid, F.
    New search for: Pensl, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (1120) Face

    New search for: Negoro, Y.
    New search for: Katsumoto, K.
    New search for: Kimoto, T.
    New search for: Matsunami, H.
    New search for: Schmid, F.
    New search for: Pensl, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (1120) Face

    Contributors:

    Negoro, Y. (author) / Katsumoto, K. (author) / Kimoto, T. (author) / Matsunami, H. (author) / Schmid, F. (author) / Pensl, G. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 913-916

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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