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A platform for research: civil engineering, architecture and urbanism
Advanced Processing Techniques for Silicon Carbide MEMS and NEMS
Advanced Processing Techniques for Silicon Carbide MEMS and NEMS
Advanced Processing Techniques for Silicon Carbide MEMS and NEMS
Zorman, C. A. (author) / Mehregany, M. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 1451-1456
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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