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MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Sumant, A.V. / Auciello, O. / Liao, M. / Williams, O.A.

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MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Sumant, A.V. / Auciello, O. / Liao, M. / Williams, O.A.

MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Sumant, A.V. / Auciello, O. / Liao, M. / Williams, O.A.

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Document information

Title:

MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Contributors:

Sumant, A.V. (author) / Auciello, O. (author) / Liao, M. (author) / Williams, O.A. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 39 ; 511-516

Publication date:

2014-01-01

Size:

6 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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