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Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

Rajanna, K. / Tanaka, S. / Itoh, T. / Esashi, M.

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Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

Rajanna, K. / Tanaka, S. / Itoh, T. / Esashi, M.

Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

Rajanna, K. / Tanaka, S. / Itoh, T. / Esashi, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

Contributors:

Rajanna, K. (author) / Tanaka, S. (author) / Itoh, T. (author) / Esashi, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 1527-1530

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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