Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

    New search for: Lei, H.
    New search for: Luo, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

    New search for: Lei, H.
    New search for: Luo, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

    New search for: Lei, H.
    New search for: Luo, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

    Contributors:

    Lei, H. (author) / Luo, J. (author)

    Published in:

    WEAR -LAUSANNE- ; 257 ; 461-470

    Publication date:

    2004-01-01

    Size:

    10 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Chemical Mechanical Polishing of Computer Hard Disk Substrate in Colloidal SiO~2 Slurry

    Lei, H. | British Library Online Contents | 2002

    Effects of non-spherical colloidal silica slurry on Al-NiP hard disk substrate CMP application

    Salleh, S. / Sudin, I. / Awang, A. | British Library Online Contents | 2016

    Effect of pH on Hard Disk Substrate Polishing in Glycine-Hydrogen Peroxide System Abrasive-Free Slurry

    Chen, S.S. / Lei, H. / Chen, R.L. | British Library Online Contents | 2013

    Latch mechanism of hard disk bracket and hard disk bracket

    YU MINGDA | European Patent Office | 2023

    Free access

    Investigation of carbon void defects on hard disk surfaces

    Zhong, Z. W. / Gee, S. H. | British Library Online Contents | 2005

    Back to top