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Effects of non-spherical colloidal silica slurry on Al-NiP hard disk substrate CMP application

Salleh, S. / Sudin, I. / Awang, A.

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Effects of non-spherical colloidal silica slurry on Al-NiP hard disk substrate CMP application

Salleh, S. / Sudin, I. / Awang, A.

Effects of non-spherical colloidal silica slurry on Al-NiP hard disk substrate CMP application

Salleh, S. / Sudin, I. / Awang, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Effects of non-spherical colloidal silica slurry on Al-NiP hard disk substrate CMP application

Contributors:

Salleh, S. (author) / Sudin, I. (author) / Awang, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 360 ; 59-68

Publication date:

2016-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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