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SiC and Si3N4 inclusions in multicrystalline silicon ingots
SiC and Si3N4 inclusions in multicrystalline silicon ingots
SiC and Si3N4 inclusions in multicrystalline silicon ingots
Soiland, A. K. (author) / Ovrelid, E. J. (author) / Engh, T. A. (author) / Lohne, O. (author) / Tuset, J. K. (author) / Gjerstad, O. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 39-43
2004-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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