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Preparation and properties of clean Si3N4 surfaces

Bermudez, V. M. / Perkins, F. K.

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Preparation and properties of clean Si3N4 surfaces

Bermudez, V. M. / Perkins, F. K.

Preparation and properties of clean Si3N4 surfaces

Bermudez, V. M. / Perkins, F. K.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation and properties of clean Si3N4 surfaces

Contributors:

Bermudez, V. M. (author) / Perkins, F. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 235 ; 406-419

Publication date:

2004-01-01

Size:

14 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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