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    Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

    New search for: Hiruta, R.
    New search for: Kuribayashi, H.
    New search for: Shimizu, S.
    New search for: Sudoh, K.
    New search for: Iwasaki, H.

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    Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

    New search for: Hiruta, R.
    New search for: Kuribayashi, H.
    New search for: Shimizu, S.
    New search for: Sudoh, K.
    New search for: Iwasaki, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

    New search for: Hiruta, R.
    New search for: Kuribayashi, H.
    New search for: Shimizu, S.
    New search for: Sudoh, K.
    New search for: Iwasaki, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing

    Contributors:

    Hiruta, R. (author) / Kuribayashi, H. (author) / Shimizu, S. (author) / Sudoh, K. (author) / Iwasaki, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 237 ; 63-67

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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