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    Effects of tetraethoxysilane vapor treatment on the cetyltrimethylammonium bromide-templated silica mesoporous low-k thin film with 3D close-packed array of spherical pores

    New search for: Han, C. K.
    New search for: Jung, S. B.
    New search for: Park, H. H.

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    Effects of tetraethoxysilane vapor treatment on the cetyltrimethylammonium bromide-templated silica mesoporous low-k thin film with 3D close-packed array of spherical pores

    New search for: Han, C. K.
    New search for: Jung, S. B.
    New search for: Park, H. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of tetraethoxysilane vapor treatment on the cetyltrimethylammonium bromide-templated silica mesoporous low-k thin film with 3D close-packed array of spherical pores

    New search for: Han, C. K.
    New search for: Jung, S. B.
    New search for: Park, H. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effects of tetraethoxysilane vapor treatment on the cetyltrimethylammonium bromide-templated silica mesoporous low-k thin film with 3D close-packed array of spherical pores

    Contributors:

    Han, C. K. (author) / Jung, S. B. (author) / Park, H. H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 237 ; 405-410

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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