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Mechanical and piezoresistive properties of InAs/AlGaSb cantilevers
Mechanical and piezoresistive properties of InAs/AlGaSb cantilevers
Mechanical and piezoresistive properties of InAs/AlGaSb cantilevers
Yamaguchi, H. (author) / Miyashita, S. (author) / Hirayama, Y. (author)
APPLIED SURFACE SCIENCE ; 237 ; 645-649
2004-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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