Magnetron Sputtering Tantalum Film Technology for Titanium

Magnetron Sputtering Tantalum Film Technology for Titanium - Coated Anode

Pan, J.-y. / Sun, F.-m. / Luo, Q.-f.

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Magnetron Sputtering Tantalum Film Technology for Titanium - Coated Anode

Pan, J.-y. / Sun, F.-m. / Luo, Q.-f.

Magnetron Sputtering Tantalum Film Technology for Titanium - Coated Anode

Pan, J.-y. / Sun, F.-m. / Luo, Q.-f.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Magnetron Sputtering Tantalum Film Technology for Titanium - Coated Anode

Contributors:

Pan, J.-y. (author) / Sun, F.-m. (author) / Luo, Q.-f. (author)

Published in:

MATERIALS PROTECTION -WUHAN- ; 37 ; 26-28

Publication date:

2004-01-01

Size:

3 pages

ISSN:

1001-1560

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.1

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