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    First investigation of metal-insulator-metal (MIM) capacitor using Pr2O3 dielectrics

    New search for: Wenger, C.
    New search for: Dabrowski, J.
    New search for: Zaumseil, P.
    New search for: Sorge, R.
    New search for: Formanek, P.
    New search for: Lippert, G.
    New search for: Mussig, H. J.

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    First investigation of metal-insulator-metal (MIM) capacitor using Pr2O3 dielectrics

    New search for: Wenger, C.
    New search for: Dabrowski, J.
    New search for: Zaumseil, P.
    New search for: Sorge, R.
    New search for: Formanek, P.
    New search for: Lippert, G.
    New search for: Mussig, H. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    First investigation of metal-insulator-metal (MIM) capacitor using Pr2O3 dielectrics

    New search for: Wenger, C.
    New search for: Dabrowski, J.
    New search for: Zaumseil, P.
    New search for: Sorge, R.
    New search for: Formanek, P.
    New search for: Lippert, G.
    New search for: Mussig, H. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    First investigation of metal-insulator-metal (MIM) capacitor using Pr2O3 dielectrics

    Contributors:

    Wenger, C. (author) / Dabrowski, J. (author) / Zaumseil, P. (author) / Sorge, R. (author) / Formanek, P. (author) / Lippert, G. (author) / Mussig, H. J. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 227-230

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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