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Polycrystalline silicon thin film made by metal-induced crystallization

Kim, D. Y. / Gowtham, M. / Shim, M. S. / Yi, J.

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Polycrystalline silicon thin film made by metal-induced crystallization

Kim, D. Y. / Gowtham, M. / Shim, M. S. / Yi, J.

Polycrystalline silicon thin film made by metal-induced crystallization

Kim, D. Y. / Gowtham, M. / Shim, M. S. / Yi, J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Polycrystalline silicon thin film made by metal-induced crystallization

Contributors:

Kim, D. Y. (author) / Gowtham, M. (author) / Shim, M. S. (author) / Yi, J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 433-437

Publication date:

2004-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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