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Cobalt-induced polycrystalline silicon film growth

Kim, J. / Piwowar, A. M. / Nowak, R. / Gradella, J. A. / Anderson, W. A.

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Cobalt-induced polycrystalline silicon film growth

Kim, J. / Piwowar, A. M. / Nowak, R. / Gradella, J. A. / Anderson, W. A.

Cobalt-induced polycrystalline silicon film growth

Kim, J. / Piwowar, A. M. / Nowak, R. / Gradella, J. A. / Anderson, W. A.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Cobalt-induced polycrystalline silicon film growth

Contributors:

Kim, J. (author) / Piwowar, A. M. (author) / Nowak, R. (author) / Gradella, J. A. (author) / Anderson, W. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 3053-3056

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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