Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates: Fid-Bau Portal

Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates

Spankova, M. / Vavra, I. / Chromik, S. / Harasek, S. / Luptak, R. / Soltys, J. / Husekova, K.

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Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates

Spankova, M. / Vavra, I. / Chromik, S. / Harasek, S. / Luptak, R. / Soltys, J. / Husekova, K.

Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates

Spankova, M. / Vavra, I. / Chromik, S. / Harasek, S. / Luptak, R. / Soltys, J. / Husekova, K.

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Title:

Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates

Contributors:

Spankova, M. (author) / Vavra, I. (author) / Chromik, S. (author) / Harasek, S. (author) / Luptak, R. (author) / Soltys, J. (author) / Husekova, K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 116 ; 30-33

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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