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    Nickel silicides in semiconductor processing: thermal budget considerations

    New search for: Ramamurthy, S.
    New search for: Ramachandran, B.
    New search for: Byun, J. S.
    New search for: Dixit, T.
    New search for: Hunter, A.
    New search for: Ramanujam, R.

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    Nickel silicides in semiconductor processing: thermal budget considerations

    New search for: Ramamurthy, S.
    New search for: Ramachandran, B.
    New search for: Byun, J. S.
    New search for: Dixit, T.
    New search for: Hunter, A.
    New search for: Ramanujam, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nickel silicides in semiconductor processing: thermal budget considerations

    New search for: Ramamurthy, S.
    New search for: Ramachandran, B.
    New search for: Byun, J. S.
    New search for: Dixit, T.
    New search for: Hunter, A.
    New search for: Ramanujam, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nickel silicides in semiconductor processing: thermal budget considerations

    Contributors:

    Ramamurthy, S. (author) / Ramachandran, B. (author) / Byun, J. S. (author) / Dixit, T. (author) / Hunter, A. (author) / Ramanujam, R. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 46-50

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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