Tungsten silicide contacts to polycrystalline silicon and silicon-germanium alloys: Fid-Bau Portal

Tungsten silicide contacts to polycrystalline silicon and silicon-germanium alloys

Srinivasan, G. / Bain, M. F. / Bhattacharyya, S. / Baine, P. / Armstrong, B. M. / Gamble, H. S. / McNeill, D. W.

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Tungsten silicide contacts to polycrystalline silicon and silicon-germanium alloys

Srinivasan, G. / Bain, M. F. / Bhattacharyya, S. / Baine, P. / Armstrong, B. M. / Gamble, H. S. / McNeill, D. W.

Tungsten silicide contacts to polycrystalline silicon and silicon-germanium alloys

Srinivasan, G. / Bain, M. F. / Bhattacharyya, S. / Baine, P. / Armstrong, B. M. / Gamble, H. S. / McNeill, D. W.

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Title:

Tungsten silicide contacts to polycrystalline silicon and silicon-germanium alloys

Contributors:

Srinivasan, G. (author) / Bain, M. F. (author) / Bhattacharyya, S. (author) / Baine, P. (author) / Armstrong, B. M. (author) / Gamble, H. S. (author) / McNeill, D. W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 223-227

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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