Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator: Fid-Bau Portal

Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator

Chen, P. / An, Z. / Zhu, M. / Fu, R. K. / Chu, P. K. / Montgomery, N. / Biswas, S.

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Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator

Chen, P. / An, Z. / Zhu, M. / Fu, R. K. / Chu, P. K. / Montgomery, N. / Biswas, S.

Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator

Chen, P. / An, Z. / Zhu, M. / Fu, R. K. / Chu, P. K. / Montgomery, N. / Biswas, S.

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Title:

Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator

Contributors:

Chen, P. (author) / An, Z. (author) / Zhu, M. (author) / Fu, R. K. (author) / Chu, P. K. (author) / Montgomery, N. (author) / Biswas, S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 251-254

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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