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    Aluminum nitride films synthesized by dual ion beam sputtering

    New search for: Han, S.
    New search for: Chen, H.-Y.
    New search for: Cheng, C.-H.
    New search for: Lin, J.-H.
    New search for: Shih, H. C.

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    Aluminum nitride films synthesized by dual ion beam sputtering

    New search for: Han, S.
    New search for: Chen, H.-Y.
    New search for: Cheng, C.-H.
    New search for: Lin, J.-H.
    New search for: Shih, H. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Aluminum nitride films synthesized by dual ion beam sputtering

    New search for: Han, S.
    New search for: Chen, H.-Y.
    New search for: Cheng, C.-H.
    New search for: Lin, J.-H.
    New search for: Shih, H. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Aluminum nitride films synthesized by dual ion beam sputtering

    Contributors:

    Han, S. (author) / Chen, H.-Y. (author) / Cheng, C.-H. (author) / Lin, J.-H. (author) / Shih, H. C. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3521-3525

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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