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Bulk-micromachined structures inside anisotropically etched cavities
Bulk-micromachined structures inside anisotropically etched cavities
Bulk-micromachined structures inside anisotropically etched cavities
Pal, P. (author) / Chandra, S. (author)
SMART MATERIALS AND STRUCTURES ; 13 ; 1424-1429
2004-01-01
6 pages
Article (Journal)
English
DDC:
530
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