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Bulk-micromachined structures inside anisotropically etched cavities
Bulk-micromachined structures inside anisotropically etched cavities
Bulk-micromachined structures inside anisotropically etched cavities
Pal, P. (Autor:in) / Chandra, S. (Autor:in)
SMART MATERIALS AND STRUCTURES ; 13 ; 1424-1429
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530
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