Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film: Fid-Bau Portal

Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

Liu, B. / Song, Z. / Zhang, T. / Feng, S. / Chen, B.

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Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

Liu, B. / Song, Z. / Zhang, T. / Feng, S. / Chen, B.

Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

Liu, B. / Song, Z. / Zhang, T. / Feng, S. / Chen, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

Contributors:

Liu, B. (author) / Song, Z. (author) / Zhang, T. (author) / Feng, S. (author) / Chen, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 242 ; 62-69

Publication date:

2005-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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