Structure and sheet resistance of boron-implanted Ge2Sb2Te5 phase change film: Fid-Bau Portal

Structure and sheet resistance of boron-implanted Ge2Sb2Te5 phase change film

Liu, B. / Song, Z. / Feng, S. / Chen, B.

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Structure and sheet resistance of boron-implanted Ge2Sb2Te5 phase change film

Liu, B. / Song, Z. / Feng, S. / Chen, B.

Structure and sheet resistance of boron-implanted Ge2Sb2Te5 phase change film

Liu, B. / Song, Z. / Feng, S. / Chen, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structure and sheet resistance of boron-implanted Ge2Sb2Te5 phase change film

Contributors:

Liu, B. (author) / Song, Z. (author) / Feng, S. (author) / Chen, B. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 119 ; 125-130

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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