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    Surface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen

    New search for: Wang, Z.
    New search for: Kato, T.
    New search for: Hirayama, T.
    New search for: Kato, N.
    New search for: Sasaki, K.
    New search for: Saka, H.

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    Surface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen

    New search for: Wang, Z.
    New search for: Kato, T.
    New search for: Hirayama, T.
    New search for: Kato, N.
    New search for: Sasaki, K.
    New search for: Saka, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen

    New search for: Wang, Z.
    New search for: Kato, T.
    New search for: Hirayama, T.
    New search for: Kato, N.
    New search for: Sasaki, K.
    New search for: Saka, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Surface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen

    Contributors:

    Wang, Z. (author) / Kato, T. (author) / Hirayama, T. (author) / Kato, N. (author) / Sasaki, K. (author) / Saka, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 241 ; 80-86

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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