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Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
Tomozawa, M. (author) / Okutsu, K. (author) / Kim, H. Y. (author) / Miyazaki, S. (author)
MATERIALS SCIENCE FORUM ; 475/479 ; 2037-2042
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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