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Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film
Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film
Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film
Ishida, A. (author) / Sato, M. (author) / Yoshikawa, W. (author) / Tabata, O. (author)
MATERIALS SCIENCE FORUM ; 394/395 ; 487-490
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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