Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process: Fid-Bau Portal

Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process

Kang, C. G. / Youn, S. W. / Lee, J. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process

Kang, C. G. / Youn, S. W. / Lee, J. W.

Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process

Kang, C. G. / Youn, S. W. / Lee, J. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process

Contributors:

Kang, C. G. (author) / Youn, S. W. (author) / Lee, J. W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 475/479 ; 3779-3782

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Kang, C. G. / Youn, S. W. / Lee, J. W. | British Library Online Contents | 2004

Nanoscratch study of hard HfB2 thin films using experimental and finite element techniques

Chatterjee, A. / Polycarpou, A. A. / Abelson, J. R. et al. | British Library Online Contents | 2010

Nanoscratch behavior of Zn1xCdxSe heteroepitaxial layers

Tsai, C. H. | British Library Online Contents | 2010

Nanoscratch in highly oriented FeSe0.5Te0.5 superconductor

Jurelo, A. R. / Serbena, F. C. / de Souza, G. B. et al. | British Library Online Contents | 2013

Nanoscratch characterization of indium nitride films

Lian, D. | British Library Online Contents | 2014