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Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices

Thompson, P. E. / Jernigan, G. / Schulze, J. / Eisele, I. / Suligoj, T.

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Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices

Thompson, P. E. / Jernigan, G. / Schulze, J. / Eisele, I. / Suligoj, T.

Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices

Thompson, P. E. / Jernigan, G. / Schulze, J. / Eisele, I. / Suligoj, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Vertical SiGe-based silicon-on-nothing (SON) technology for sub-30nm MOS devices

Contributors:

Thompson, P. E. (author) / Jernigan, G. (author) / Schulze, J. (author) / Eisele, I. (author) / Suligoj, T. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 51-57

Publication date:

2005-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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