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    SiGe heterostucture field-effect transistor with ICP mesa treatments

    New search for: Lee, C. H.
    New search for: Wu, S. L.
    New search for: Jinn Chang, S.

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    SiGe heterostucture field-effect transistor with ICP mesa treatments

    New search for: Lee, C. H.
    New search for: Wu, S. L.
    New search for: Jinn Chang, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    SiGe heterostucture field-effect transistor with ICP mesa treatments

    New search for: Lee, C. H.
    New search for: Wu, S. L.
    New search for: Jinn Chang, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    SiGe heterostucture field-effect transistor with ICP mesa treatments

    Contributors:

    Lee, C. H. (author) / Wu, S. L. (author) / Jinn Chang, S. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 371-375

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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