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Phosphorus diffusion in Si-based resonant interband tunneling diodes and tri-state logic using vertically stacked diodes
Phosphorus diffusion in Si-based resonant interband tunneling diodes and tri-state logic using vertically stacked diodes
Phosphorus diffusion in Si-based resonant interband tunneling diodes and tri-state logic using vertically stacked diodes
Jin, N. (author) / Chung, S. Y. (author) / Heyns, R. M. (author) / Berger, P. R. (author) / Yu, R. (author) / Thompson, P. E. (author) / Rommel, S. L. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 411-416
2005-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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