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A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon
A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon
A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon
Mazaleyrat, G. (author) / Estève, A. (author) / Jeloaica, L. (author) / Djafari-Rouhani, M. (author)
COMPUTATIONAL MATERIALS SCIENCE ; 33 ; 74-82
2005-01-01
9 pages
Article (Journal)
English
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