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    CVD Growth and Characterization of 4H-SiC Epitaxial Film on (1120) As-Cut Substrates

    New search for: Zhang, Z.
    New search for: Gao, Y.
    New search for: Arjunan, A. C.
    New search for: Toupitsyn, E. Y.
    New search for: Sadagopan, P.
    New search for: Kennedy, R.
    New search for: Sudarshan, T. S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    CVD Growth and Characterization of 4H-SiC Epitaxial Film on (1120) As-Cut Substrates

    New search for: Zhang, Z.
    New search for: Gao, Y.
    New search for: Arjunan, A. C.
    New search for: Toupitsyn, E. Y.
    New search for: Sadagopan, P.
    New search for: Kennedy, R.
    New search for: Sudarshan, T. S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    CVD Growth and Characterization of 4H-SiC Epitaxial Film on (1120) As-Cut Substrates

    New search for: Zhang, Z.
    New search for: Gao, Y.
    New search for: Arjunan, A. C.
    New search for: Toupitsyn, E. Y.
    New search for: Sadagopan, P.
    New search for: Kennedy, R.
    New search for: Sudarshan, T. S.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    CVD Growth and Characterization of 4H-SiC Epitaxial Film on (1120) As-Cut Substrates

    Contributors:

    Zhang, Z. (author) / Gao, Y. (author) / Arjunan, A. C. (author) / Toupitsyn, E. Y. (author) / Sadagopan, P. (author) / Kennedy, R. (author) / Sudarshan, T. S. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 113-116

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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