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Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Sugishita, S. (author) / Shoji, A. (author) / Mukai, Y. (author) / Nishiguchi, T. (author) / Michikami, K. (author) / Issiki, T. (author) / Ohshima, S. (author) / Nishino, S. (author) / Nipoti, R. / Poggi, A.
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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