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Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Lateral Epitaxial Overgrowth of 3C-SiC on Si Substrates by CVD Method
Sugishita, S. (Autor:in) / Shoji, A. (Autor:in) / Mukai, Y. (Autor:in) / Nishiguchi, T. (Autor:in) / Michikami, K. (Autor:in) / Issiki, T. (Autor:in) / Ohshima, S. (Autor:in) / Nishino, S. (Autor:in) / Nipoti, R. / Poggi, A.
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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