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    Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

    New search for: Shibagaki, M.
    New search for: Kurematsu, Y.
    New search for: Watanabe, F.
    New search for: Haga, S.
    New search for: Miura, K.
    New search for: Suzuki, T.
    New search for: Satoh, M.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

    New search for: Shibagaki, M.
    New search for: Kurematsu, Y.
    New search for: Watanabe, F.
    New search for: Haga, S.
    New search for: Miura, K.
    New search for: Suzuki, T.
    New search for: Satoh, M.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

    New search for: Shibagaki, M.
    New search for: Kurematsu, Y.
    New search for: Watanabe, F.
    New search for: Haga, S.
    New search for: Miura, K.
    New search for: Suzuki, T.
    New search for: Satoh, M.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Development of the Novel Electron Bombardment Anneal System (EBAS) for SiC Post Ion Implantation Anneal

    Contributors:

    Shibagaki, M. (author) / Kurematsu, Y. (author) / Watanabe, F. (author) / Haga, S. (author) / Miura, K. (author) / Suzuki, T. (author) / Satoh, M. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 609-612

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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