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Surface Preparation of 6H-SiC Substrates by Electron Beam Annealing

Agueev, O. A. / Avdeev, S. P. / Svetlichnyi, A. M. / Konakova, R. V. / Milenin, V. V. / Lytvyn, P. M. / Lytvyn, O. S. / Okhrimenko, O. B. / Soloviev, S. I. / Sudarshan, T. S.

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Surface Preparation of 6H-SiC Substrates by Electron Beam Annealing

Agueev, O. A. / Avdeev, S. P. / Svetlichnyi, A. M. / Konakova, R. V. / Milenin, V. V. / Lytvyn, P. M. / Lytvyn, O. S. / Okhrimenko, O. B. / Soloviev, S. I. / Sudarshan, T. S.

Surface Preparation of 6H-SiC Substrates by Electron Beam Annealing

Agueev, O. A. / Avdeev, S. P. / Svetlichnyi, A. M. / Konakova, R. V. / Milenin, V. V. / Lytvyn, P. M. / Lytvyn, O. S. / Okhrimenko, O. B. / Soloviev, S. I. / Sudarshan, T. S.

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Title:

Surface Preparation of 6H-SiC Substrates by Electron Beam Annealing

Contributors:

Agueev, O. A. (author) / Avdeev, S. P. (author) / Svetlichnyi, A. M. (author) / Konakova, R. V. (author) / Milenin, V. V. (author) / Lytvyn, P. M. (author) / Lytvyn, O. S. (author) / Okhrimenko, O. B. (author) / Soloviev, S. I. (author) / Sudarshan, T. S. (author)

Published in:

Silicon Carbide and Related Materials 2004 ; 725-728

MATERIALS SCIENCE FORUM ; 483/485

Publication date:

2005-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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