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    Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

    New search for: Pereira, L.
    New search for: Barquinha, P.
    New search for: Fortunato, E.
    New search for: Martins, R.

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    Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

    New search for: Pereira, L.
    New search for: Barquinha, P.
    New search for: Fortunato, E.
    New search for: Martins, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

    New search for: Pereira, L.
    New search for: Barquinha, P.
    New search for: Fortunato, E.
    New search for: Martins, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide

    Contributors:

    Pereira, L. (author) / Barquinha, P. (author) / Fortunato, E. (author) / Martins, R. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 210-213

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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