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    Deposition of sputtered iridium oxide-Influence of oxygen flow in the reactor on the film properties

    New search for: Slavcheva, E.
    New search for: Schnakenberg, U.
    New search for: Mokwa, W.

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    Deposition of sputtered iridium oxide-Influence of oxygen flow in the reactor on the film properties

    New search for: Slavcheva, E.
    New search for: Schnakenberg, U.
    New search for: Mokwa, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Deposition of sputtered iridium oxide-Influence of oxygen flow in the reactor on the film properties

    New search for: Slavcheva, E.
    New search for: Schnakenberg, U.
    New search for: Mokwa, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Deposition of sputtered iridium oxide-Influence of oxygen flow in the reactor on the film properties

    Contributors:

    Slavcheva, E. (author) / Schnakenberg, U. (author) / Mokwa, W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 1964-1969

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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