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Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis

Yunfeng, H. / Zhaofeng, C. / Litong, Z.

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Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis

Yunfeng, H. / Zhaofeng, C. / Litong, Z.

Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis

Yunfeng, H. / Zhaofeng, C. / Litong, Z.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of Iridium Films by MOCVD and Deposition Effectiveness Analysis

Contributors:

Yunfeng, H. (author) / Zhaofeng, C. (author) / Litong, Z. (author)

Published in:

RARE METAL MATERIALS AND ENGINEERING ; 34 ; 139-142

Publication date:

2005-01-01

Size:

4 pages

ISSN:

1002-185X

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 669

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