Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry

    New search for: Patzner, P.
    New search for: Osipov, A. V.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry

    New search for: Patzner, P.
    New search for: Osipov, A. V.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry

    New search for: Patzner, P.
    New search for: Osipov, A. V.
    New search for: Hess, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry

    Contributors:

    Patzner, P. (author) / Osipov, A. V. (author) / Hess, P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 247 ; 204-210

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Detection of ultrathin biological films using vacuum ultraviolet spectroscopic ellipsometry

    Goyal, D. K. / Pribil, G. K. / Woollam, J. A. et al. | British Library Online Contents | 2008

    Real-time diagnostics of growth of germanium nanocrystallites on partially hydrogen-terminated silicon surfaces by spectroscopic ellipsometry

    Schmitt, F. / Osipov, A. V. / Hess, P. | British Library Online Contents | 2002

    Albumin adsorption on oxide thin films studied by spectroscopic ellipsometry

    Silva-Bermudez, P. / Rodil, S. E. / Muhl, S. | British Library Online Contents | 2011

    Spectroscopic ellipsometry

    British Library Online Contents | 2005

    Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry

    Yan, Z.D. / Sun, L.D. / Zeppenfeld, P. et al. | British Library Online Contents | 2013

    Back to top