A platform for research: civil engineering, architecture and urbanism
Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry
Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry
Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry
Yan, Z.D. (author) / Sun, L.D. (author) / Zeppenfeld, P. (author) / Hu, C. (author) / Hu, X.T. (author)
MATERIALPRUFUNG ; 55 ; 139-142
2013-01-01
4 pages
Article (Journal)
English
DDC:
620
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 2005
Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
British Library Online Contents | 2015
|In situ real time ellipsometry monitoring during GaN epilayers processing
British Library Online Contents | 1999
|In situ control of SiOx composition by spectroscopic ellipsometry
British Library Online Contents | 2003
|In situ spectral ellipsometry for real-time measurement and control
British Library Online Contents | 1993
|